Foundry






Technology







Micrel's Wafer Fab Division offers foundry services to commercial, military, and MEMS IC designers and all manufacturers seeking a production solution compatible with their specific application and/or technology needs. The Micrel foundry provides a variety of flexible wafer fabrication and processing resources which can address unique requirements for short runs or for volume production. The facility has been certified to ISO14001:2004, the International Environmental Management System Standard. This environmental management system strives to ensure regulatory compliance and reduce environmental impact through waste reduction and recycling. In addition, Micrel continues to focus on constantly improving its quality, safety and environmental practices by deploying practices that significantly reduce water and energy consumption, saving considerable operating funds as well as preserving the environment. Be sure to read our whitepaper about MEMS Foundry Selection.


1
2
3
4
5
6
7
8
9
10
11
BCD5
BCD3
BiCMOS
BCC
B2CD2
BCDH12
CSI1.25
B2CD1.2
CSI0.5
B2CD0.5
B2CD0.35
Process Spec. No.
200-0001
200-0047
200-0041
200-0064
200-0065
200-0073
200-0067
200-0069
200-0071
200-0072
200-0077
Year Introduced
1987
1989
1990
1993
1994
1999
1999
1999
2002
2003
2005
 1. NCH (LV)
1.2μ
1.2μ
0.5μ
0.5μ
0.35μ
 2. PCH (LV)
11μ
11μ
1.2μ
1.2μ
0.5μ
0.5μ
0.35μ
 3. GATEOX
750Å
500Å
1200Å
1200Å
300Å
500Å
220Å
220Å
115Å
115Å
70Å
 4. VNPN (KHz)
Yes (P)
Yes
Yes
Yes
Yes
Yes (P)
Yes (N)
Yes
Yes (N)
Yes
Yes
 5. LPNP (KHz)
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
Yes
 6. VNPN (GHz)
No
No
No
No
1.5GHz
No
No
1.5GHz
No
3GHz
6GHz
 7. VPNP (GHz)
No
No
No
No
1.1GHz
No
No
1.1GHz
No
2GHz
4GHz
 8. HVNPN
160V
115V
No
No
70V
70V
No
70V
No
15V
No
 9. LHVLPNP
No
No
No
No
70V
70V
No
70V
No
15V
No
 10. Poly-em Pwr NPN
No
No
No
Yes (bp)
No
No
No
No
No
No
No
 11. Trench Isolation
No
No
No
No
No
No
No
No
No
No
Option
 12. VDMOS (NCH)
145V
70V
No
No
No
70V
No
No
No
No
No
 13. LDMOS (NCH)
145V
20V/70V
110V
35V
240V (R)
240V (R)
No
25V/240V
No
TBD
TBD
 14. LDMOS (PCH)
No
No
No
No
70V
70V
No
70V
No
TBD
TBD
 15. HVPCH (P)
160V
80V
60V
60V
120V
No
No
70V
No
No
No
 16. Schottky
30V
25V
140V
50V
25V
25V (T)
25V (T)
25V (T)
20V (T)
20V (T)
TBD
 17. Double Poly
Yes
Yes
No
No
Yes
No
Yes
Yes
Yes
Yes
Yes
 18. Poly-R Resistors
No
No
No
No
Yes
No
Yes
Yes
Yes
Yes
Yes
 19. M1 Pitch
10μ
6.0μ
12μ
12μ
5.0μ
3.2μ
3.2μ
3.2μ
1.2μ
1.2μ
0.95μ
 20. Stacked Via
No
No
No
No
No
No
No
No
Yes
Yes
Yes
 21. Polycide
No
No
No
No
No
No
No
No
No
No
No
 22. # Metals
1
1
1
1
2
2
2
2
3
3
3
Notes:
Voltages shown are "typical" and microns shown are "minimum." NPN voltages shown are BVCBO.
R = Resurf. T = TiSi2. P = PWELL. bp = BiPMOS. N = NWELL collector. Row 6/7 complementary bipolar. LVCEO is 25V absolute maximum for BCD2/BCD12: 15V for BCD05 and 6V for BCD035. Poly-R is available at 500 at 1500Ω/sq.
Thick metal options to 2μ available.
Red columns: SPICE models not available.